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1

Magnetic debris mitigation system for extreme ultraviolet sources

Elg, Daniel T., Sporre, John R., Curreli, Davide, Shchelkanov, Ivan A., Ruzic, David N., Umstadter, Karl R.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2015

Language:

english

File:

PDF, 1.43 MB

english, 2015

2

A Model of Micro Electro-Discharge Machining Plasma Discharge in Deionized Water

Mujumdar, Soham S., Curreli, Davide, Kapoor, Shiv G., Ruzic, David

Journal:

Journal of Manufacturing Science and Engineering

Year:

2014

Language:

english

File:

PDF, 12.09 MB

english, 2014

3

Modeling and measurement of hydrogen radical densities of in situ plasma-based Sn cleaning source

Elg, Daniel T., Panici, Gianluca A., Peck, Jason A., Srivastava, Shailendra N., Ruzic, David N.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2017

Language:

english

File:

PDF, 1.96 MB

english, 2017

4

[American Institute of Aeronautics and Astronautics 44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit - Hartford, CT ()] 44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit - Plasma Properties in the Magnetic Nozzle of an Electron Cyclotron Resonance Plasma Source

Rovey, Joshua, Stubbers, Robert, Jurczyk, Brian, Manley, Fred, Ruzic, David, Williams, Michael

Year:

2008

Language:

english

File:

PDF, 513 KB

english, 2008

5

Modeling and measuring the transport and scattering of energetic debris in an extreme ultraviolet plasma source

Sporre, John R., Elg, Daniel T., Kalathiparambil, Kishor K., Ruzic, David N.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2016

Language:

english

File:

PDF, 2.70 MB

english, 2016

6

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Extreme Ultraviolet (EUV) Lithography IV - Collector optic in-situ Sn removal using hydrogen plasma

Sporre, John R., Naulleau, Patrick P., Elg, Dan, Ruzic, David N., Srivastava, Shailendra N., Fomenkov, Igor V., Brandt, David C.

Year:

2013

Language:

english

File:

PDF, 5.07 MB

english, 2013

7

Stellarator Research Opportunities: A Report of the National Stellarator Coordinating Committee

Gates, David A., Anderson, David, Anderson, S., Zarnstorff, M., Spong, Donald A., Weitzner, Harold, Neilson, G. H., Ruzic, D., Andruczyk, D., Harris, J. H., Mynick, H., Hegna, C. C., Schmitz, O., Talm

Journal:

Journal of Fusion Energy

Year:

2018

Language:

english

File:

PDF, 2.57 MB

english, 2018

8

An in-situ technique to measure erosion and deposition in fusion devices

David N. Ruzic, Glenn A. Gerdin

Journal:

Journal of Nuclear Materials

Year:

1987

Language:

english

File:

PDF, 467 KB

english, 1987

9

Neutral atom and molecular transport in a gaseous divertor

Journal:

Journal of Nuclear Materials

Year:

1995

Language:

english

File:

PDF, 411 KB

english, 1995

10

Debris transport analysis at the intermediate focus of an extreme ultraviolet light source

Sporre, John, Ruzic, David N.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 3.88 MB

english, 2012

11

Downstream plasma transport and metal ionization in a high-powered pulsed-plasma magnetron

Meng, Liang, Yu, He, Szott, Matthew M., McLain, Jake T., Ruzic, David N.

Journal:

Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 2.06 MB

english, 2014

12

High power pulsed magnetron sputtering: A method to increase deposition rate

Raman, Priya, Shchelkanov, Ivan A., McLain, Jake, Ruzic, David N

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2015

Language:

english

File:

PDF, 4.28 MB

english, 2015

13

High deposition rate symmetric magnet pack for high power pulsed magnetron sputtering

Raman, Priya, Shchelkanov, Ivan, McLain, Jake, Cheng, Matthew, Ruzic, David, Haehnlein, Ian, Jurczyk, Brian, Stubbers, Robert, Armstrong, Sean

Journal:

Surface and Coatings Technology

Year:

2015

Language:

english

File:

PDF, 848 KB

english, 2015

14

Modeling of Melt-Pool Formation and Material Removal in Micro-Electrodischarge Machining

Mujumdar, Soham S., Curreli, Davide, Kapoor, Shiv G., Ruzic, David

Journal:

Journal of Manufacturing Science and Engineering

Year:

2015

Language:

english

File:

PDF, 2.21 MB

english, 2015

15

[ASME ASME 2014 International Manufacturing Science and Engineering Conference collocated with the JSME 2014 International Conference on Materials and Processing and the 42nd North American Manufacturing Research Conference - Detroit, Michigan, USA (Monday 9 June 2014)] Volume 1: Materials; Micro and Nano Technologies; Properties, Applications and Systems; Sustainable Manufacturing - Modeling of Melt-Pool Formation and Material Removal in Micro Electro-Discharge Machining

Mujumdar, Soham S., Curreli, Davide, Kapoor, Shiv G., Ruzic, David

Year:

2014

Language:

english

File:

PDF, 5.08 MB

english, 2014

16

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Extreme Ultraviolet (EUV) Lithography III - Energetic ion and neutral energy analyzer for extreme-ultraviolet light sources

Andruczyk, Daniel, Sporre, John, Elg, Dan, Cho, Tae, Ruzic, David N., Naulleau, Patrick P., Wood II, Obert R.

Year:

2012

Language:

english

File:

PDF, 1.98 MB

english, 2012

17

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Extreme Ultraviolet (EUV) Lithography III - Modeling the ion beam target interaction to reduce defects generated by ion beam deposition

Cardinal, Thomas, Andruczyk, Daniel, Yu, He, Jindal, Vibhu, Kearney, Patrick, Ruzic, David N., Naulleau, Patrick P., Wood II, Obert R.

Year:

2012

Language:

english

File:

PDF, 268 KB

english, 2012

18

Wetting properties of liquid lithium on lithium compounds

Krat, S.A., Popkov, A.S., Gasparyan, Yu. M., Pisarev, A.A., Fiflis, Peter, Szott, Matthew, Christenson, Michael, Kalathiparambil, Kishor, Ruzic, David N.

Journal:

Fusion Engineering and Design

Year:

2016

Language:

english

File:

PDF, 1.13 MB

english, 2016

19

In situ collector cleaning and extreme ultraviolet reflectivity restoration by hydrogen plasma for extreme ultraviolet sources

Elg, Daniel T., Sporre, John R., Panici, Gianluca A., Srivastava, Shailendra N., Ruzic, David N.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2016

Language:

english

File:

PDF, 1.90 MB

english, 2016

20

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Extreme Ultraviolet (EUV) Lithography VIII - Study of Sn removal by surface wave plasma for source cleaning

Panning, Eric M., Goldberg, Kenneth A., Panici, Gianluca, Qerimi, Dren, Ruzic, David N.

Year:

2017

Language:

english

File:

PDF, 830 KB

english, 2017

21

Influence of wettability due to laser-texturing on critical heat flux in vertical flow boiling

Bottini, Joseph L., Kumar, Vineet, Hammouti, Sabrina, Ruzic, David, Brooks, Caleb S.

Journal:

International Journal of Heat and Mass Transfer

Year:

2018

Language:

english

File:

PDF, 3.81 MB

english, 2018

22

Atmospheric pressure microwave plasma for aluminum surface cleaning

BÃ³novÃ¡, Lucia, Zhu, Weikun, Patel, Dhruval K., Krogstad, Daniel V., Ruzic, David N.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2020

File:

PDF, 2.15 MB

2020

23

Erosion, transport, and tritium codeposition analysis of a beryllium wall tokamak

Jeffrey N. Brooks, Jean Paul Allain, Darren A. Alman, David N. Ruzic

Journal:

Fusion Engineering and Design

Year:

2005

Language:

english

File:

PDF, 524 KB

english, 2005

24

Observations of liquid lithium uptake in a porous molybdenum foam

M.A. Jaworski, C.Y. Lau, David L. Urbansky, M.B. Malfa, T.K. Gray, M.J. Neumann, D.N. Ruzic

Journal:

Journal of Nuclear Materials

Year:

2008

Language:

english

File:

PDF, 771 KB

english, 2008

25

Sputtering erosion of beryllium coated plasma facing components—general considerations and analysis for ITER detached plasma regime

Jeffrey N Brooks, David N Ruzic, Douglas B Hayden

Journal:

Fusion Engineering and Design

Year:

1997

Language:

english

File:

PDF, 117 KB

english, 1997

26

The role of magnetron sputtering in the manufacture of microelectronics

Journal:

Czechoslovak Journal of Physics

Year:

1998

Language:

english

File:

PDF, 32 KB

english, 1998

27

Neutral modeling in industrial plasmas

David N. Ruzic, Daniel R. Juliano

Journal:

Czechoslovak Journal of Physics

Year:

1998

Language:

english

File:

PDF, 30 KB

english, 1998

28

The Development of an Asymmetric Hydrogenation Process for the Preparation of Solifenacin

Ružič, Miloš, Pečavar, Anica, Prudič, Darja, Kralj, David, Scriban, Corina, Zanotti-Gerosa, Antonio

Journal:

Organic Process Research & Development

Year:

2012

Language:

english

File:

PDF, 717 KB

english, 2012

29

The effects of surface roughness characterized by fractal geometry on sputtering

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1990

Language:

english

File:

PDF, 775 KB

english, 1990

30

Time exposure performance of Mo-Au Gibbsian segregating alloys for extreme ultraviolet collector optics

Qiu, Huatan, Srivastava, Shailendra N., Thompson, Keith C., Neumann, Martin J., Ruzic, David N.

Journal:

Year:

2008

Language:

english

File:

PDF, 7.14 MB

english, 2008

31

Energetic particle fluxes in magnetron sputter deposition of a-Si:H

Alan M. Myers, James R. Doyle, G. Jeff Feng, Nagi Maley, David L. Ruzic, John R. Abelson

Journal:

Journal of Non-Crystalline Solids

Year:

1991

Language:

english

File:

PDF, 349 KB

english, 1991

32

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Extreme Ultraviolet (EUV) Lithography IV - Contamination concerns at the intermediate focus of an extreme ultraviolet light source

Ruzic, David N., Sporre, John, Elg, Dan, Curreli, Davide, Naulleau, Patrick P.

Year:

2013

Language:

english

File:

PDF, 1.57 MB

english, 2013

33

High-energy density beams and plasmas for micro- and nano-texturing of surfaces by rapid melting and solidification

Surla, Vijay, Ruzic, David

Journal:

Journal of Physics D Applied Physics

Year:

2011

Language:

english

File:

PDF, 1.27 MB

english, 2011

34

Investigation and optimization of the magnetic field configuration in high-power impulse magnetron sputtering

Yu, He, Meng, Liang, Szott, Matthew M, Meister, Jack T, Cho, Tae S, Ruzic, David N

Journal:

Plasma Sources Science and Technology

Year:

2013

Language:

english

File:

PDF, 2.81 MB

english, 2013

35

Nitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron

Wang, Zhehui, Cohen, Samuel A., Ruzic, David N., Goeckner, M. J.

Journal:

Physical Review E

Year:

2000

Language:

english

File:

PDF, 167 KB

english, 2000

36

Deposition of aluminum oxide by evaporative coating at atmospheric pressure (ECAP)

Wu, Yui Lun, Hong, Jungmi, Peterson, David, Zhou, Jeffrey, Cho, Tae S., Ruzic, D.N.

Journal:

Surface and Coatings Technology

Year:

2013

Language:

english

File:

PDF, 2.24 MB

english, 2013

37

[IEEE 2007 IEEE 22nd Symposium on Fusion Engineering - Albuquerque, NM, USA (2007.06.17-2007.06.21)] 2007 IEEE 22nd Symposium on Fusion Engineering - Overview and Status of the Divertor Erosion and Vapor shielding eXperiment (DEVeX)

Gray, Travis K., Williams, Michael J., Ruzic, David N.

Year:

2007

Language:

english

File:

PDF, 1.36 MB

english, 2007

38

Deposition of YSZ Thin Films by Atmospheric Plasma-Assisted Pulsed Laser Ablation

Ouyang, Zihao, Cho, Tae-Seung, Ruzic, David N.

Journal:

IEEE Transactions on Plasma Science

Year:

2012

Language:

english

File:

PDF, 305 KB

english, 2012

39

Characterization of an Atmospheric-Pressure Helium Plasma Generated by 2.45-GHz Microwave Power

Ouyang, Zihao, Surla, Vijay, Cho, Tae Seung, Ruzic, David N.

Journal:

IEEE Transactions on Plasma Science

Year:

2012

Language:

english

File:

PDF, 878 KB

english, 2012

40

[IEEE 21st IEEE/NPS Symposium on Fusion Engineering SOFE 05 - Knoxville, TN, USA (2005.9.26-2005.9.26)] 21st IEEE/NPS Symposium on Fusion Engineering SOFE 05 - Density and Temperature Measurements in the ELM Simulating Plasma (ESP) Gun

Gray, Travis, Masters, Benjamin, Stubbers, Robert, Ruzic, David

Year:

2006

Language:

english

File:

PDF, 4.19 MB

english, 2006

41

Laboratory Investigation of Vapor Shielding for Lithium-Coated Molybdenum in Devex

Jung, Soonwook, Andruczyk, Daniel, Ruzic, David N.

Journal:

IEEE Transactions on Plasma Science

Year:

2012

Language:

english

File:

PDF, 516 KB

english, 2012

42

Computational studies of thermoelectric MHD driven liquid lithium flow in metal trenches

Xu, Wenyu, Curreli, Davide, Ruzic, David N.

Journal:

Fusion Engineering and Design

Year:

2014

Language:

english

File:

PDF, 2.15 MB

english, 2014

43

Liquid lithium surface control and its effect on plasma performance in the HT-7 tokamak

Zuo, G.Z., Ren, J., Hu, J.S., Sun, Z., Yang, Q.X., Li, J.G., Zakharov, L.E., Ruzic, David N.

Journal:

Fusion Engineering and Design

Year:

2014

Language:

english

File:

PDF, 3.50 MB

english, 2014

44

Influences on ionization fraction in an inductively coupled ionized physical vapor deposition device plasma

Juliano, Daniel R., Ruzic, David N., Allain, Monica M. C., Hayden, Douglas B.

Journal:

Journal of Applied Physics

Year:

2002

Language:

english

File:

PDF, 800 KB

english, 2002

45

In situ plasma diagnostics study of a commercial high-power hollow cathode magnetron deposition tool

Meng, Liang, Raju, Ramasamy, Flauta, Randolph, Shin, Hyungjoo, Ruzic, David N., Hayden, Douglas B.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2010

Language:

english

File:

PDF, 989 KB

english, 2010

46

Total scattering cross sections and interatomic potentials for neutral hydrogen and helium on some noble gases

Ruzic, David N., Cohen, Samuel A.

Journal:

The Journal of Chemical Physics

Year:

1985

Language:

english

File:

PDF, 488 KB

english, 1985

47

Origin of defects on targets used to make extreme ultraviolet mask blanks

Yu, He, Andruczyk, Daniel, Ruzic, David N., Jindal, Vibhu, Kearney, Patrick

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2013

Language:

english

File:

PDF, 1.80 MB

english, 2013

48

[IEEE 2011 IEEE 38th International Conference on Plasma Sciences (ICOPS) - Chicago, IL, USA (2011.06.26-2011.06.30)] 2011 Abstracts IEEE International Conference on Plasma Science - Optical and electrical diagnostics on extended Dielectric Barrier Discharge source

Jungmi Hong,, Yui Lun Wu,, Zihao Ouyang,, Cho, Tae S., Ruzic, David N.

Year:

2011

Language:

english

File:

PDF, 32 KB

english, 2011

49

Direct measurement and modeling of the redirected ion flux in a high-powered pulsed-plasma magnetron

Meng, Liang, Yu, He, Sporre, John R., Raman, Priya, Szott, Matthew M., McLain, Jake T., Ruzic, David N.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2015

Language:

english

File:

PDF, 1.67 MB

english, 2015

50

[AIP RADIO FREQUENCY POWER IN PLASMAS: 17th Topical Conference on Radio Frequency Power in Plasmas - Clearwater (Florida) (7-9 May 2007)] AIP Conference Proceedings - Study of RF Breakdown Mechanisms Relevant to an ICH Antenna Environment

Caughman, J. B. O., Castano-Giraldo, C., Aghazarian, M., Baity, F. W., Rasmussen, D. A., Ruzic, D. N., Ryan, Philip M., Rasmussen, David

Year:

2007

Language:

english

File:

PDF, 5.77 MB

english, 2007

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